The IMI Colloquium Report in October 9, 2024
October 28, 2024
Title: Utilizing numerical simulations for high-precision resistivity
Speaker: Dr. Taiga Nakano from Napson Corporation
Place: IMI Auditorium(W1-D-413) and Live streaming with zoom
Attendance: 32 (Students: 8; Staff: 20; Others 4)
At the October colloquium, Nakano Taiga (Napson Corporation) gave a lecture on the utilize of mathematics in the development and manufacture of highly accurate and reliable resistivity and sheet resistance measurement equipment for the semiconductor industry.
First, he introduced Napson Corporation, the development of the company and their business activities. Then, he introduced his career; he touched on his involvement with mathematics during his national institute of technology, university, and doctoral program days.
After that, he explained the four point probe method used in contact type semiconductor resistivity measurement devices, and introduced the Poisson equation with homogeneous Neumann boundary conditions, whose source term is described with dirac delta functions centered on two probes, as a mathematical model of the method. In addition, he introduced numerical analysis (which can be applied in case of more complex domain shapes), such as error estimates of mixed finite element solutions and numerical velifications of approximate solutions using the Hypercircle method.
Finally, through some numerical results, he explained the contribution of numerical analysis to the performance improvement of semiconductor resistivity measurement equipment using the four point probe method, and future prospects.
Through the mathematical analysis of partial differential equations and the numerical analysis of the finite element method, we were able to learn how mathematics is useful in the manufacturing process. The faculty members who collaborate with industries were able to learn usesfull knowledge in future collaborations among industries and academia, and the students were able to learn examples of the mathematics used in industry.